Document Type

Conference Proceeding

Conference

Interferometry XVI: Techniques and Analysis

Publication Date

8-2012

DOI

10.1117/12.927439

City

San Diego, CA

Abstract

Our recent study found that it is very difficult to use the binary defocusing technique to completely suppress the 3rd-order harmonics, and thus it is challenging to achieve high-quality three-dimensional (3-D) measurement with the Fourier transformation method. This paper presents a novel approach to effectively eliminate the 3rd order harmonics by modulating the binary structured patterns in both x and y directions. Both simulation and experimental results will be presented to verify the performance of the proposed technique.

Comments

This is a conference proceeding from Interferometry XVI: Techniques and Analysis 8493 (2012): 1, doi:10.1117/12.927439. Posted with permission.

Copyright 2012 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic electronic or print reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.

Copyright Owner

Society of Photo-Optical Instrumentation Engineers

Language

en

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