Towards superfast 3D optical metrology with digital micromirror device (DMD) platforms
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Abstract
This paper summarizes our decade-long research efforts towards superfast 3D shape measurement leveraging the digital micromirror device (DMD) platforms. Specifically, we will present the following technologies: (1) high-resolution real-time 3D shape measurement technology that achieves 30 Hz simultaneous 3D shape acquisition, reconstruction and display with more than 300,000 points per frame; (2) Superfast 3D optical metrology technology that achieves 3D measurement at a rate of tens of kHz utilizing the binary defocusing method we invented; and (3) the improvement of the binary defocusing technology for superfast and high-accuracy 3D optical metrology using the DMD platforms. This paper will present both principles and experimental results. © (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Comments
This is a conference proceeding from Emerging Digital Micromirror Device Based Systems and Applications VI 8979 (2014): 1, doi:10.1117/12.2035270. Posted with permission.
Copyright 2014 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic electronic or print reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.