Document Type

Conference Proceeding

Conference

2007 MRS Meeting

Publication Date

2007

DOI

10.1557/PROC-1052-DD05-10

City

Boston, MA

Abstract

A miniature sensor consisting of two adjacent micromachined cantilevers (a sensing/reference pair) is developed for detection of chemical and biological species. A novel interferometric technique is utilized to measure the differential bending of sensing cantilever with respect to reference. Presence of species is detected by measuring the differential surface stress associated with adsorption/absorption of chemical species on sensing cantilever. Surface stress associated with formation of alkanethiol self-assembled monolayers (SAMs) on the sensing cantilever is measured to characterize the sensor performance.

Comments

This is a conference proceeding from 2007 MRS Fall Meeting 1052 (2007): 171, doi:10.1557/PROC-1052-DD05-10. Posted with permission.

Copyright Owner

Materials Research Society

Language

en

Share

Article Location

 
COinS