Document Type

Conference Proceeding

Conference

Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2007

Publication Date

2007

DOI

doi:10.1117/12.715958

City

San Diego, CA

Abstract

A miniature differential surface stress sensor consisting of two adjacent micromachined cantilevers (a sensing/reference pair) is developed for detection of chemical and biological species. Presence of analyte species is detected by measuring the differential surface stress associated with adsorption/absorption of chemical species on sensing cantilever. A novel interferometric technique is utilized to measure the differential surface stress induced bending of sensing cantilever with respect to reference cantilever. Sensor performance is characterized through measurement of surface stress associated with formation of alkanethiol self-assembled monolayers (SAMs) on gold coated sensing cantilever. Chemisorptions and self-assembly of alkanethiol molecules onto the gold-coated cantilever surface leads to development of compressive surface stress. Magnitude of measured surface stress compares well with data reported in literature.

Comments

This is a conference proceeding from Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2007 6529 (2007): 1, doi:10.1117/12.715958. Posted with permission.

Copyright 2007 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic electronic or print reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.

Copyright Owner

Society of Photo-Optical Instrumentation Engineers

Language

en

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