Document Type

Article

Publication Date

4-1-2014

Journal or Book Title

Optical Engineering

Volume

53

Issue

11

First Page

1

Last Page

9

DOI

10.1117/1.OE.53.11.112206

Abstract

Decade-long research efforts toward superfast three-dimensional (3-D) shape measurement leveraging the digital micromirror device (DMD) platforms are summarized. Specifically, we will present the following technologies: (1) high-resolution real-time 3-D shape measurement technology that achieves 30 Hz simultaneous 3-D shape acquisition, reconstruction, and display with more than 300,000 points per frame; (2) superfast 3-D optical metrology technology that achieves 3-D measurement at a rate of tens of kilohertz utilizing the binary defocusing method we invented; and (3) the improvement of the binary defocusing technology for superfast and high-accuracy 3-D optical metrology using the DMD platforms. Both principles and experimental results are presented.

Comments

This article is from Optical Engineering 53 (2014): 1, doi:10.1117/1.OE.53.11.112206. Posted with permission.

Rights

Copyright 2014 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic electronic or print reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.

Copyright Owner

Society of Photo-Optical Instrumentation Engineers

Language

en

File Format

application/pdf

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