Document Type

Article

Publication Date

10-2010

Journal or Book Title

Microscopy and Microanalysis

Volume

16

Issue

5

First Page

636

Last Page

642

DOI

10.1017/S1431927610000437

Abstract

Three-dimensional atom probe tomography (APT) is successfully used to analyze the near-apex regions of an atomic force microscope (AFM) tip. Atom scale material structure and chemistry from APT analysis for standard silicon AFM tips and silicon AFM tips coated with a thin film of Cu is presented. Comparison of the thin film data with that observed using transmission electron microscopy indicates that APT can be reliably used to investigate the material structure and chemistry of the apex of an AFM tip at near atomic scales.

Comments

This article is from Microscopy and Microanalysis 16 (2010): 636–642, doi:10.1017/S1431927610000437. Posted with permission.

Copyright Owner

Microscopy Society of America

Language

en

File Format

application/pdf

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