Document Type

Patent

Publication Date

1-8-2013

Abstract

An optical micro-electro-mechanical systems (MEMS) structure is provided. The structure includes an elastomer membrane, a plurality of polymer fibers attached to the elastomer membrane, an array of detectors operatively connected to the plurality of polymer fibers at a first end of the plurality of polymer fibers, and a microlens array operatively connected to the plurality of polymer fibers at a second end of the plurality of polymer fibers. A method of manufacturing an optical MEMS structure is provided. The method includes forming a hollow PDMS chamber in which PDMS fibers extend from top to bottom using a lost wax molding process.

Patent Number

8,351,106 B2

Assignee

Iowa State University Research Foundation, Inc.

Application Number

13/180,668

Date Filed

7-12-2011

Language

en

File Format

application/pdf

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