Manufacturing method of photonic crystal
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Date
2013-01-29
Authors
Park, In Sung
Lee, Tae Ho
Ahn, Jin Ho
Biswas, Rana
Constant, Kristen
Ho, Kai-Ming
Lee, Jae-Hwang
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Constant, Kristen
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Iowa State University Research Foundation, Inc.
The Iowa State University Research Foundation (ISURF) seeks to protect the intellectual property (including new discoveries, technologies, or creative works) of the university's students & faculty which is continuously created through research and other undertakings. It seeks to manage, protect, and own all intellectual property on behalf of the university. The Iowa State University Research Foundation was created in 1938.
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Abstract
A manufacturing method of a photonic crystal is provided. In the method, a high-refractive-index material is conformally deposited on an exposed portion of a periodic template composed of a low-refractive-index material by an atomic layer deposition process so that a difference in refractive indices or dielectric constants between the template and adjacent air becomes greater, which makes it possible to form a three-dimensional photonic crystal having a superior photonic bandgap. Herein, the three-dimensional structure may be prepared by a layer-by-layer method.