Document Type

Patent

Publication Date

1-29-2013

Abstract

A manufacturing method of a photonic crystal is provided. In the method, a high-refractive-index material is conformally deposited on an exposed portion of a periodic template composed of a low-refractive-index material by an atomic layer deposition process so that a difference in refractive indices or dielectric constants between the template and adjacent air becomes greater, which makes it possible to form a three-dimensional photonic crystal having a superior photonic bandgap. Herein, the three-dimensional structure may be prepared by a layer-by-layer method.

Patent Number

US 8,361,545 B2

Assignee

Iowa State University Research Foundation, Inc.

Application Number

US 12/227,594

Date Filed

6-1-2006

Language

en

File Format

application/pdf

US20090169735.pdf (1317 kB)
US 2009/0169735 A1 (United States Patent Application Publication)

US20130115434.pdf (1205 kB)
US 2013/0115434 A1 (United States Patent Application Publication)

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