Campus Units

Electrical and Computer Engineering

Document Type

Article

Publication Version

Published Version

Publication Date

2006

Journal or Book Title

Journal of Applied Physics

Volume

100

Issue

3

First Page

036106

DOI

10.1063/1.2234545

Abstract

Electron mobility in the growth direction was measured using space charge limited current techniques in device-type nin structure nanocrystalline Si:H and nanocrystalline Ge:H structures. The films were grown on stainless steel foil using either hot wire or remote plasma enhanced chemical vapor deposition techniques. Grain size and crystallinity were measured using x ray and Raman spectroscopy. The size of grains in films was adjusted by changing the deposition conditions. It was found that large ⟨220⟩ grain sizes (∼56nm)" role="presentation" style="display: inline; line-height: normal; word-spacing: normal; word-wrap: normal; white-space: nowrap; float: none; direction: ltr; max-width: none; max-height: none; min-width: 0px; min-height: 0px; border: 0px; padding: 0px 2px 0px 0px; margin: 0px; position: relative;">(∼56nm)(∼56nm) could be obtained using the hot wire deposition technique, and the conductivity mobility at room temperature was measured to be 5.4cm2∕Vs" role="presentation" style="display: inline; line-height: normal; word-spacing: normal; word-wrap: normal; white-space: nowrap; float: none; direction: ltr; max-width: none; max-height: none; min-width: 0px; min-height: 0px; border: 0px; padding: 0px 2px 0px 0px; margin: 0px; position: relative;">5.4cm2/Vs5.4cm2∕Vs in films with such large grains. The plasma-grown films had smaller grains and smaller mobilities. The mobility was found to increase with increasing grain size and with increasing temperature.

Comments

This article is from Journal of Applied Physics 100 (2006): 036106, doi:10.1063/1.2234545.

Rights

This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing.

Copyright Owner

American Institute of Physics

Language

en

File Format

application/pdf

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