Degree Type

Thesis

Date of Award

2008

Degree Name

Master of Science

Department

Mechanical Engineering

First Advisor

Palaniappa A. Molian

Abstract

This thesis provides a scientific investigation of the ablation behavior of single crystal 4H-SiC and 6H-SiC to improve the manufacturability and high-temperature performance of SiC based MEMS pressure sensors using laser applications. The ablation characteristics of both the polytypes were studied using pulsed lasers and micromachining results were presented. The study shows the possibility of these devices capable of operating in harsh environments.

DOI

https://doi.org/10.31274/etd-180810-2407

Copyright Owner

Saurabh Gupta

Language

en

Date Available

2012-04-30

File Format

application/pdf

File Size

112 pages

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