Degree Type


Date of Award


Degree Name

Master of Science


Mechanical Engineering

First Advisor

Nicole Hashemi


Humidity sensors can be used to monitor body sweat. Here, we studied a humidity sensor that comprised of a graphene layer between two electrodes. The operating principle is that the humidity sensor will respond when vapor reaches the graphene layer from the top. Based on the humidity diffusion, the sensor measures the relative humidity (RH) with different response times. Graphene is a material with high diffusivity and small thickness that can increase the sensitivity of a sensor. Based on the Micro Electro Mechanical Systems (MEMS) method, we modeled the humidity sensor using COMSOL Multiphysics transport of diluted species software. Finally, we used the concentration values from the simulations to determine the relationship between capacitance and relative humidity. The sensitivity was found to be 3.379 ×10^−11 pF/%RH for the 4-layer graphene, 1.210 ×10^−14 pF/%RH for the 8-layer graphene, and 3.597 ×10^−11 pF/%RH for the 16-layer graphene sensor. The sensitivity of 4-layer graphene with gold sensor is 3.872 ×10^−13 pF/%RH which is smaller than 4-layer graphene one, and graphene with gold should have better response time than 4-layer graphene.

Copyright Owner




File Format


File Size

61 pages