Old Title: Hard Mask Patterning of Hafnia Nanoparticle Films Final Title: Nucleation and Growth of Shape-Controlled Hafnia Nanocrystals

Hafnia nanocrystals which exhibit one dimensional growth are synthesized via a sol-gel reaction, and the effects of time, temperature, and ligand selection are measured and utilized to control nanocrystal shape and size. Here we report the yield, phase, and a detailed procedure for their synthesis, as well as a kinetic model of growth that fits a simple exponential trend, from which an activation energy can be obtained. Additionally, we propose a crystallization and growth mechanism wherein an amorphous precursor network is formed in solution from the starting compounds, and is crystallized at the reaction temperature by a crystallization agent.