Document Type
Conference Proceeding
Conference
2007 MRS Meeting
Publication Date
2007
DOI
10.1557/PROC-1052-DD05-10
City
Boston, MA
Abstract
A miniature sensor consisting of two adjacent micromachined cantilevers (a sensing/reference pair) is developed for detection of chemical and biological species. A novel interferometric technique is utilized to measure the differential bending of sensing cantilever with respect to reference. Presence of species is detected by measuring the differential surface stress associated with adsorption/absorption of chemical species on sensing cantilever. Surface stress associated with formation of alkanethiol self-assembled monolayers (SAMs) on the sensing cantilever is measured to characterize the sensor performance.
Copyright Owner
Materials Research Society
Copyright Date
2008
Language
en
Recommended Citation
Kang, Kyungho and Shrotriya, Pranav, "Novel Differential Surface Stress Sensor for Detection of Chemical and Biological Species" (2007). Mechanical Engineering Conference Presentations, Papers, and Proceedings. 87.
https://lib.dr.iastate.edu/me_conf/87
Included in
Biochemical and Biomolecular Engineering Commons, Computer-Aided Engineering and Design Commons, Process Control and Systems Commons
Comments
This is a conference proceeding from 2007 MRS Fall Meeting 1052 (2007): 171, doi:10.1557/PROC-1052-DD05-10. Posted with permission.