Materials Science and Engineering, Physics and Astronomy, Ames Laboratory
Photonic Crystal Materials and Devices IV
Journal or Book Title
Proceedings of SPIE
February 28, 2006
San Jose, CA
For photonic devices, extending beyond the planar regime to the third dimension can allow a higher degree of integration and novel functionalities for applications such as photonic crystals and integrated optical circuits. Although conventional photolithography can achieve both high quality and structural control, it is still costly and slow for threedimensional (3D) fabrication. Moreover, as diverse functional polymers emerge, there is potential to develop new techniques for quick and economical fabrication of 3D structures. We present a 3D microfabrication technique based on the soft lithographic technique, called two-polymer microtransfer molding (2P-µTM) to accomplish low cost, high structural fidelity and tailorable 3D microfabrication for polymers. Using 2P-µTM, highly layered polymeric microstructures are achievable by stacking planar structures layer by layer. For increased processing control, the surface chemistry of the polymers is characterized as a function of changing ultraviolet dosage to optimize yield in layer transfer. We discuss the application of the 2P-µTM to build polymer templates for woodpile photonic crystals, and demonstrate methods for converting the polymer templates to dielectric and metallic photonic crystal structures. Finally, we will show that 2P-µTM is promising for fabricating 3D polymeric optical waveguides.
SPIE--The International Society for Optical Engineering
Lee, Jae-Hwang; Kim, Chang-Hwan; Constant, Kristen P.; and Ho, Kai-Ming, "Tailorable, 3D microfabrication for photonic applications: Two-polymer microtransfer molding" (2006). Materials Science and Engineering Conference Papers, Posters and Presentations. 40.