Fabrication of submicron metallic grids with interference and phase-mask holography

Joong Mok Park, Iowa State University
Tae Geun Kim, Korea University - Korea
Kristen P. Constant, Iowa State University
Kai-Ming Ho, Iowa State University

This article is from J. Micro/Nanolith. MEMS MOEMS 10 (2011): 1, doi:10.1117/1.3541794. Posted with permission.

Abstract

Complex, submicron Cu metallic mesh nanostructures are made by electrochemical deposition using polymer templates made from photoresist. The polymer templates are fabricated with photoresist using two-beam interference holography and phase mask holography with three diffracted beams. Freestanding metallic mesh structures are made in two separate electrodepositions with perpendicular photoresist grating templates. Cu mesh square nanostructures having large (52.6%) open areas are also made by single electrodeposition with a photoresist template made with a phase mask. These structures have potential as electrodes in photonic devices.