Journal or Book Title
Applied Physics Letters
We studied the first-order diffractedmoiré fringes of transparent multilayered structures comprised of irregularly deformed periodic patterns. By a comparison study of the diffractedmoiré fringe pattern and detailed microscopy of the structure, we show that the diffractedmoiré fringe can be used as a nondestructive tool to analyze the alignment of multilayered structures. We demonstrate the alignment method for the case of layer-by-layer microstructures using soft lithography. The alignment method yields high contrast of fringes even when the materials being aligned have very weak contrasts. The imaging method of diffractedmoiré fringes is a versatile visual tool for the microfabrication of transparent deformable microstructures in layer-by-layer fashion.
Copyright 2005 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.
American Institute of Physics
Lee, Jae-Hwang; Kim, Chang-Hwan; Kim, Yong-Sung; Ho, Kai-Ming; Constant, Kristen P.; Leung, Wai Y.; and Oh, Cha-Hwan, "Diffracted moiré fringes as analysis and alignment tools for multilayer fabrication in soft lithography" (2005). Materials Science and Engineering Publications. 92.