Document Type

Article

Publication Date

2005

Journal or Book Title

Applied Physics Letters

Volume

86

Issue

20

First Page

204101

DOI

10.1063/1.1927268

Abstract

We studied the first-order diffractedmoiré fringes of transparent multilayered structures comprised of irregularly deformed periodic patterns. By a comparison study of the diffractedmoiré fringe pattern and detailed microscopy of the structure, we show that the diffractedmoiré fringe can be used as a nondestructive tool to analyze the alignment of multilayered structures. We demonstrate the alignment method for the case of layer-by-layer microstructures using soft lithography. The alignment method yields high contrast of fringes even when the materials being aligned have very weak contrasts. The imaging method of diffractedmoiré fringes is a versatile visual tool for the microfabrication of transparent deformable microstructures in layer-by-layer fashion.

Comments

The following article appeared in Applied Physics Letters 86 (2005): 204101 and may be found at http://dx.doi.org/10.1063/1.1927268.

Rights

Copyright 2005 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

Copyright Owner

American Institute of Physics

Language

en

File Format

application/pdf

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