An optical micro-electro-mechanical systems (MEMS) structure is provided. The structure includes an elastomer membrane, a plurality of polymer fibers attached to the elastomer membrane, an array of detectors operatively connected to the plurality of polymer fibers at a first end of the plurality of polymer fibers, and a microlens array operatively connected to the plurality of polymer fibers at a second end of the plurality of polymer fibers. A method of manufacturing an optical MEMS structure is provided. The method includes forming a hollow PDMS chamber in which PDMS fibers extend from top to bottom using a lost wax molding process.
Iowa State University Research Foundation, Inc.
Kim, Jaeyoun, "Elastometric device for tunable imaging" (2013). Iowa State University Patents. 27.