Integrated Ultrasonic Transducer

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1979
Authors
White, Richard
Kwan, Sze-Hon
Chuang, Kent
Muller, Richard
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Review of Progress in Quantitative Nondestructive Evaluation
Center for Nondestructive Evaluation

Begun in 1973, the Review of Progress in Quantitative Nondestructive Evaluation (QNDE) is the premier international NDE meeting designed to provide an interface between research and early engineering through the presentation of current ideas and results focused on facilitating a rapid transfer to engineering development.

This site provides free, public access to papers presented at the annual QNDE conference between 1983 and 1999, and abstracts for papers presented at the conference since 2001.

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Abstract

The typical transducer considered consists of a piezoelectric film, and associated.electrodes, connected to one gate of a dual-gate field-effect transistor in the silicon wafer on which the piezoelectric film is situated. An individual transducer responds to various modes of excitation (flexural, surface, bulk) at frequencies which may range from far below one Hertz to hundreds of megahertz. The second gate of the field-effect transistor can be used for electrical amplitude control or for mixing purposes, Connection of a number of these small transducers together to form arrays permits realizing ultrasonic receiving devices having variable directivity, and progammable surface-wave signal processors.

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