Location

La Jolla, CA

Start Date

1980 12:00 AM

Description

The Scanning Laser Acoustic Microscope (SLAM) operating at a frequency of 100 MHz is used to characterize solid inclusions in silicon nitride. Ten, seven millimeter thick discs, with 100 and 400 micron implanted inclusions are analyzed. We find that the images of a solid inclusion are characterized by a bright high transmission central zone, a well defined dark boundary and a characteristic diffraction ring pattern. These image features differentiate solid inclusions from pores and voids which may also be encountered in the samples. The images of the implanted flaws were generally found to be larger than anticipated. This can be understood in terms of the divergence of the sound due to diffraction and due to lens action of the curved boundary of the flaw. Our initial observations suggest that accurate estimates of defect size may be obtaiRable from a more complete analysis of SLAM micrographs.

Book Title

Proceedings of the ARPA/AFML Review of Progress in Quantitative NDE

Chapter

15. Failure Modes, Defect Characterization, and Accept/Reject Criteria

Pages

683-690

Language

en

File Format

application/pdf

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Jan 1st, 12:00 AM

Scanning Laser Acoustic Microscope Visualization of Solid Inclusions in Silicon Nitride

La Jolla, CA

The Scanning Laser Acoustic Microscope (SLAM) operating at a frequency of 100 MHz is used to characterize solid inclusions in silicon nitride. Ten, seven millimeter thick discs, with 100 and 400 micron implanted inclusions are analyzed. We find that the images of a solid inclusion are characterized by a bright high transmission central zone, a well defined dark boundary and a characteristic diffraction ring pattern. These image features differentiate solid inclusions from pores and voids which may also be encountered in the samples. The images of the implanted flaws were generally found to be larger than anticipated. This can be understood in terms of the divergence of the sound due to diffraction and due to lens action of the curved boundary of the flaw. Our initial observations suggest that accurate estimates of defect size may be obtaiRable from a more complete analysis of SLAM micrographs.