Atomic Force Microscopy: General Principles and a New Implementation

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1987
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McClelland, Gary
Erlandsson, Ragnar
Chiang, Shirley
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Review of Progress in Quantitative Nondestructive Evaluation
Center for Nondestructive Evaluation

Begun in 1973, the Review of Progress in Quantitative Nondestructive Evaluation (QNDE) is the premier international NDE meeting designed to provide an interface between research and early engineering through the presentation of current ideas and results focused on facilitating a rapid transfer to engineering development.

This site provides free, public access to papers presented at the annual QNDE conference between 1983 and 1999, and abstracts for papers presented at the conference since 2001.

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Abstract

Recently, Binnig, Quate, and Gerber developed the atomic force microscope (AFM), an instrument which senses minute (10-12 – 10-8 N) forces between a sharp tip and a sample surface [1], In addition to enabling the study of solid-solid interactions on a unprecedentedly small scale, the AFM provides a general method for doing non-destructive surface profilometry at a resolution better than 10 nm and perhaps down to the atomic level. In this paper we review the principles of the AFM, discuss its potential resolution and data rate, describe our new AFM design, and present some initial results. We have obtained three dimensional surface profiles with 20 nm lateral resolution, which to our knowledge is better than what has been attained previously by stylus profilometry.

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Sat Aug 01 00:00:00 UTC 1987