Location

La Jolla, CA

Start Date

1-1-1987 12:00 AM

Description

We have been carrying out research on two types of scanning optical microscopes with the aim of measuring not only the width of surface features, but also the thickness of thin films and surface profiles.

Book Title

Review of Progress in Quantitative Nondestructive Evaluation

Volume

6B

Chapter

Chapter 7: Electronic Materials and Devices

Section

Electronic Materials and Devices

Pages

1315-1326

DOI

10.1007/978-1-4613-1893-4_149

Language

en

File Format

application/pdf

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Jan 1st, 12:00 AM

Scanning Differential Contrast Microscopy

La Jolla, CA

We have been carrying out research on two types of scanning optical microscopes with the aim of measuring not only the width of surface features, but also the thickness of thin films and surface profiles.