Presenter Information

Jon Opsal, Therma-Wave, Inc.

Location

La Jolla, CA

Start Date

1-1-1987 12:00 AM

Description

The absorption of an intensity modulated laser beam results in a modulated temperature profile having the properties of a critically damped wave, i. e., a thermal wave [1]. In a semiconductor such as silicon, if the energy per photon exceeds the band gap energy, then, in addition to the thermal wave, one has a photo-generated electron-hole plasma density that can also be characterized as a critically damped propagating wave, i. e., a plasma wave [2]. In this paper, we present a theoretical description of these two phenomena that shows how they can be used to obtain information about transport and carrier recombination properties of semiconductors. Included in our analysis will be the effects of linear coupling between heat and mass transport (i. e., thermodiffusion) on the propagation of thermal waves and plasma waves.

Book Title

Review of Progress in Quantitative Nondestructive Evaluation

Volume

6B

Chapter

Chapter 7: Electronic Materials and Devices

Section

Electronic Materials and Devices

Pages

1339-1346

DOI

10.1007/978-1-4613-1893-4_151

Language

en

File Format

application/pdf

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Jan 1st, 12:00 AM

Thermal and Plasma Waves in Semiconductors

La Jolla, CA

The absorption of an intensity modulated laser beam results in a modulated temperature profile having the properties of a critically damped wave, i. e., a thermal wave [1]. In a semiconductor such as silicon, if the energy per photon exceeds the band gap energy, then, in addition to the thermal wave, one has a photo-generated electron-hole plasma density that can also be characterized as a critically damped propagating wave, i. e., a plasma wave [2]. In this paper, we present a theoretical description of these two phenomena that shows how they can be used to obtain information about transport and carrier recombination properties of semiconductors. Included in our analysis will be the effects of linear coupling between heat and mass transport (i. e., thermodiffusion) on the propagation of thermal waves and plasma waves.