Location

La Jolla, CA

Start Date

1-1-1987 12:00 AM

Description

In another paper in these proceedings, Opsal [1] discusses the origin of the modulated reflectance signal observed in silicon under the experimental conditions employed in the Therma-Probe system [2]. These experimental conditions are described in the paper by Smith, Hahn and Arst in these proceedings [3]. Table I lists the major differences between our type of modulated optical reflectance experiments and the more conventional photoreflectance experiments [4–10].

Book Title

Review of Progress in Quantitative Nondestructive Evaluation

Volume

6A

Chapter

Chapter 1: General Techniques—Fundamentals

Section

Thermal Waves

Pages

237-244

DOI

10.1007/978-1-4613-1893-4_27

Language

en

File Format

application/pdf

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Jan 1st, 12:00 AM

Temporal Behavior of Modulated Reflectance Signal in Silicon

La Jolla, CA

In another paper in these proceedings, Opsal [1] discusses the origin of the modulated reflectance signal observed in silicon under the experimental conditions employed in the Therma-Probe system [2]. These experimental conditions are described in the paper by Smith, Hahn and Arst in these proceedings [3]. Table I lists the major differences between our type of modulated optical reflectance experiments and the more conventional photoreflectance experiments [4–10].