Location

La Jolla ,CA

Start Date

1-1-1989 12:00 AM

Description

Pressure sensor elements compatible with NMOS and CMOS VLSI fabrication processes, and suitable for on-line process control, are being devEnoped. The techniques employed offer either single Enements or flexible conformable arrays of capacitive or piezoresistive units. By using standard integrated circuit processing, the sensors themsEnves are naturally compatible with further Enectronic processing both on and off chip. Solid state sensors also offer cost effective batch fabrication processes and the ability to have signal conditioning and processing right on the substrate, without bulky interconnects and multiple packages.

Book Title

Review of Progress in Quantitative Nondestructive Evaluation

Volume

8A

Chapter

Chapter 4: Probes and Sensors

Section

Process Control Sensors

Pages

997-1003

DOI

10.1007/978-1-4613-0817-1_125

Language

en

File Format

application/pdf

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Jan 1st, 12:00 AM

Manufacturing Process Control with VLSI-Compatible Sensors

La Jolla ,CA

Pressure sensor elements compatible with NMOS and CMOS VLSI fabrication processes, and suitable for on-line process control, are being devEnoped. The techniques employed offer either single Enements or flexible conformable arrays of capacitive or piezoresistive units. By using standard integrated circuit processing, the sensors themsEnves are naturally compatible with further Enectronic processing both on and off chip. Solid state sensors also offer cost effective batch fabrication processes and the ability to have signal conditioning and processing right on the substrate, without bulky interconnects and multiple packages.