Location

La Jolla ,CA

Start Date

1-1-1989 12:00 AM

Description

We have built a scanning acoustic microscope operating in the 3–10 MHz range that measures both amplitude and phase [1,2]. This enables us to do image processing that cannot be done with amplitude or phase alone. We have demonstrated numerical enhancement of the transverse and depth resolution of the microscope. The transverse resolution is increased by approximately 20% and the depth resolution is doubled. We have applied this technique to measuring the profile of deep trenches (2 mm wide by 5 mm deep) which were designed as scale models of integrated circuit capacitors (2.5 µm wide by 6µm deep). These techniques could be used to characterize integrated circuits with an acoustic microscope operating at higher frequencies or with an optical microscope that measures amplitude and phase.

Book Title

Review of Progress in Quantitative Nondestructive Evaluation

Volume

8A

Chapter

Chapter 3: Interpretive Signal and Image Processing

Section

Image and Signal Processing

Pages

717-725

DOI

10.1007/978-1-4613-0817-1_90

Language

en

File Format

application/pdf

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Jan 1st, 12:00 AM

Three-Dimensional Image Processing for Acoustic Microscopy

La Jolla ,CA

We have built a scanning acoustic microscope operating in the 3–10 MHz range that measures both amplitude and phase [1,2]. This enables us to do image processing that cannot be done with amplitude or phase alone. We have demonstrated numerical enhancement of the transverse and depth resolution of the microscope. The transverse resolution is increased by approximately 20% and the depth resolution is doubled. We have applied this technique to measuring the profile of deep trenches (2 mm wide by 5 mm deep) which were designed as scale models of integrated circuit capacitors (2.5 µm wide by 6µm deep). These techniques could be used to characterize integrated circuits with an acoustic microscope operating at higher frequencies or with an optical microscope that measures amplitude and phase.