Location

La Jolla, CA

Start Date

1-1-1991 12:00 AM

Description

In the past two decades there has been growing interest in the development of integrated acoustic sensors. Sensors based on bulk (BAW) [1,2] and surface (SAW) [3,4] were reported. Most of these sensors operate in a gaseous medium, although a few are used with liquids or solids, to determine concentrations of chemical and biological substances, as well as viscosity, acceleration, temperature, pressure, etc. Recently, Wenzel and White [5] have found out that flexural plate wave gravimetric sensors can have higher mass sensitivity at low operating frequencies (a few MHz) than the BAW or SAW counterparts. The lowest flexural (antisymmetric) Lamb mode, A0, was used for thin isotropic plates [5]. The thickness of the plates is much smaller than an acoustic wavelength.

Book Title

Review of Progress in Quantitative Nondestructive Evaluation

Volume

10B

Chapter

Chapter 9: Manufacturing and Reliability

Pages

2157-2163

DOI

10.1007/978-1-4615-3742-7_134

Language

en

File Format

application/pdf

Included in

Manufacturing Commons

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Jan 1st, 12:00 AM

Thin Rod Flexural Acoustic Wave Devices: A Sensor Candidate

La Jolla, CA

In the past two decades there has been growing interest in the development of integrated acoustic sensors. Sensors based on bulk (BAW) [1,2] and surface (SAW) [3,4] were reported. Most of these sensors operate in a gaseous medium, although a few are used with liquids or solids, to determine concentrations of chemical and biological substances, as well as viscosity, acceleration, temperature, pressure, etc. Recently, Wenzel and White [5] have found out that flexural plate wave gravimetric sensors can have higher mass sensitivity at low operating frequencies (a few MHz) than the BAW or SAW counterparts. The lowest flexural (antisymmetric) Lamb mode, A0, was used for thin isotropic plates [5]. The thickness of the plates is much smaller than an acoustic wavelength.