Line-Focus Acoustic Mcroscopy Measurements of Thin-Film Elastic Constants
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Begun in 1973, the Review of Progress in Quantitative Nondestructive Evaluation (QNDE) is the premier international NDE meeting designed to provide an interface between research and early engineering through the presentation of current ideas and results focused on facilitating a rapid transfer to engineering development.
This site provides free, public access to papers presented at the annual QNDE conference between 1983 and 1999, and abstracts for papers presented at the conference since 2001.
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Abstract
Thin film materials are widely used as hard, protective coatings for softer surfaces. It is known that fracture strength and hardness are related to the elastic and plastic properties [1]. The elastic constants of the film deposited on a substrate are, however, difficult to measure. By a technique which was recently discussed [2] the elastic constants of amorphous (isotropic) films and single-crystal (anisotropic) films can be obtained by measuring the velocities of surface acoustic waves (SAWs) propagating over a thin-film/ substrate specimen by the use of a line-focus acoustic microscope.