Location
La Jolla, CA
Start Date
1-1-1993 12:00 AM
Description
Thin film materials are widely used as hard, protective coatings for softer surfaces. It is known that fracture strength and hardness are related to the elastic and plastic properties [1]. The elastic constants of the film deposited on a substrate are, however, difficult to measure. By a technique which was recently discussed [2] the elastic constants of amorphous (isotropic) films and single-crystal (anisotropic) films can be obtained by measuring the velocities of surface acoustic waves (SAWs) propagating over a thin-film/ substrate specimen by the use of a line-focus acoustic microscope.
Book Title
Review of Progress in Quantitative Nondestructive Evaluation
Volume
12B
Chapter
Chapter 6: Material Properties
Section
Thin Films and Coatings
Pages
1899-1906
DOI
10.1007/978-1-4615-2848-7_243
Copyright Owner
Springer-Verlag US
Copyright Date
January 1993
Language
en
File Format
application/pdf
Included in
Acoustics, Dynamics, and Controls Commons, Other Materials Science and Engineering Commons
Line-Focus Acoustic Mcroscopy Measurements of Thin-Film Elastic Constants
La Jolla, CA
Thin film materials are widely used as hard, protective coatings for softer surfaces. It is known that fracture strength and hardness are related to the elastic and plastic properties [1]. The elastic constants of the film deposited on a substrate are, however, difficult to measure. By a technique which was recently discussed [2] the elastic constants of amorphous (isotropic) films and single-crystal (anisotropic) films can be obtained by measuring the velocities of surface acoustic waves (SAWs) propagating over a thin-film/ substrate specimen by the use of a line-focus acoustic microscope.
