Location

La Jolla, CA

Start Date

1-1-1993 12:00 AM

Description

Thin film materials are widely used as hard, protective coatings for softer surfaces. It is known that fracture strength and hardness are related to the elastic and plastic properties [1]. The elastic constants of the film deposited on a substrate are, however, difficult to measure. By a technique which was recently discussed [2] the elastic constants of amorphous (isotropic) films and single-crystal (anisotropic) films can be obtained by measuring the velocities of surface acoustic waves (SAWs) propagating over a thin-film/ substrate specimen by the use of a line-focus acoustic microscope.

Book Title

Review of Progress in Quantitative Nondestructive Evaluation

Volume

12B

Chapter

Chapter 6: Material Properties

Section

Thin Films and Coatings

Pages

1899-1906

DOI

10.1007/978-1-4615-2848-7_243

Language

en

File Format

application/pdf

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Jan 1st, 12:00 AM

Line-Focus Acoustic Mcroscopy Measurements of Thin-Film Elastic Constants

La Jolla, CA

Thin film materials are widely used as hard, protective coatings for softer surfaces. It is known that fracture strength and hardness are related to the elastic and plastic properties [1]. The elastic constants of the film deposited on a substrate are, however, difficult to measure. By a technique which was recently discussed [2] the elastic constants of amorphous (isotropic) films and single-crystal (anisotropic) films can be obtained by measuring the velocities of surface acoustic waves (SAWs) propagating over a thin-film/ substrate specimen by the use of a line-focus acoustic microscope.