Location

Snowmass Village, CO

Start Date

1-1-1995 12:00 AM

Description

Silicon backplate capacitance air-coupled transducers have particular advantages over other types of air coupled ultrasonic transducer. Such advantages include the ease of manufacture and the ability to reproduce field characteristics. This is achieved by using a polished silicon backplate and introducing controlled surface roughness by etching holes into the backplate to create a series of air springs. The performance of such devices has been investigated [1], and it was found that the combination of bandwidth and sensitivity leads to a range of NDE applications. The aim of the present paper is to compare the pressure field of these transducers to that predicted by theory for a plane piston transducer in air.

Book Title

Review of Progress in Quantitative Nondestructive Evaluation

Volume

14A

Chapter

Chapter 4: Transducers, Sensors, and Process Control

Section

Ultrasonic Transducers

Pages

945-950

DOI

10.1007/978-1-4615-1987-4_119

Language

en

File Format

application/pdf

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Jan 1st, 12:00 AM

Characterisation of the Field of an Air-Coupled Ultrasonic Silicon Capacitance Transducer

Snowmass Village, CO

Silicon backplate capacitance air-coupled transducers have particular advantages over other types of air coupled ultrasonic transducer. Such advantages include the ease of manufacture and the ability to reproduce field characteristics. This is achieved by using a polished silicon backplate and introducing controlled surface roughness by etching holes into the backplate to create a series of air springs. The performance of such devices has been investigated [1], and it was found that the combination of bandwidth and sensitivity leads to a range of NDE applications. The aim of the present paper is to compare the pressure field of these transducers to that predicted by theory for a plane piston transducer in air.