Location

Snowmass Village, CO

Start Date

1-1-1995 12:00 AM

Description

AC photovoltage (PV) and surface photovoltage (SPV) measurements, as nondestructive methods, have been used successfully to monitor the change of electronic properties induced by the latent scratches, polishing and other processing in semiconductor materials and devices [1–3].

Volume

14B

Chapter

Chapter 8: NDE Systems, Reliability, and Transferability

Section

NDE Systems

Pages

2375-2382

DOI

10.1007/978-1-4615-1987-4_303

Language

en

File Format

application/pdf

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Jan 1st, 12:00 AM

AC Photovoltaic Detection of Buried Structures of Semiconductor Wafers

Snowmass Village, CO

AC photovoltage (PV) and surface photovoltage (SPV) measurements, as nondestructive methods, have been used successfully to monitor the change of electronic properties induced by the latent scratches, polishing and other processing in semiconductor materials and devices [1–3].