Location

Seattle, WA

Start Date

1-1-1996 12:00 AM

Description

Development of air-coupled capacitance ultrasonic transducers that operate above 100kHz have recently been of interest. The main applications for these devices include the location and imaging of objects, and in the nondestructive evaluation of engineering materials. To control the response of either as a source or a receiver, we needed to investigate the effect of using different backplate materials and manufacturing techniques. Backplates were produced in a range of materials such as silicon, copper and stainless steel. Various techniques of micromachining such as chemical etching, laser machining and ion beam machining were used.

Volume

15A

Chapter

Chapter 4: NDE Sensors

Section

Ultrasonic Transducers (Air Coupled)

Pages

1043-1050

DOI

10.1007/978-1-4613-0383-1_136

Language

en

File Format

application/pdf

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Jan 1st, 12:00 AM

The Response of an Air-Coupled Ultrasonic Transducer for Various Backplates and Apertures

Seattle, WA

Development of air-coupled capacitance ultrasonic transducers that operate above 100kHz have recently been of interest. The main applications for these devices include the location and imaging of objects, and in the nondestructive evaluation of engineering materials. To control the response of either as a source or a receiver, we needed to investigate the effect of using different backplate materials and manufacturing techniques. Backplates were produced in a range of materials such as silicon, copper and stainless steel. Various techniques of micromachining such as chemical etching, laser machining and ion beam machining were used.