Start Date

2016 12:00 AM

Description

In this study, we suggest a method to measure residual stress of thin films nondestructively using dispersion characteristics of Rayleigh wave. Silver films were deposited on glass substrate by controlling the fabrication condition such as DC power and Ar pressure in order to verify a change of the surface acoustic wave velocity depending on the residual stress. The surface acoustic wave velocity of the thin films with different residual stress was measured using the V(z) curve method of scanning acoustic microscopy. To verify the actual residual stress in thin film, the X-ray diffraction method was applied. The change of the Rayleigh wave velocity and XRD results were agreed well with. The primary results indicate that suggested methods may be successfully applied to nondestructively measure the residual stress of thin films.

Language

en

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Jan 1st, 12:00 AM

Evaluation of Residual Stress in Ag/Glass Thin Films Using Dispersion Characteristic of Rayleigh Wave

In this study, we suggest a method to measure residual stress of thin films nondestructively using dispersion characteristics of Rayleigh wave. Silver films were deposited on glass substrate by controlling the fabrication condition such as DC power and Ar pressure in order to verify a change of the surface acoustic wave velocity depending on the residual stress. The surface acoustic wave velocity of the thin films with different residual stress was measured using the V(z) curve method of scanning acoustic microscopy. To verify the actual residual stress in thin film, the X-ray diffraction method was applied. The change of the Rayleigh wave velocity and XRD results were agreed well with. The primary results indicate that suggested methods may be successfully applied to nondestructively measure the residual stress of thin films.