Degree Type
Dissertation
Date of Award
1976
Degree Name
Doctor of Philosophy
Department
Electrical and Computer Engineering
DOI
https://doi.org/10.31274/rtd-180813-17369
Publisher
Digital Repository @ Iowa State University, http://lib.dr.iastate.edu/
Copyright Owner
Charlie Louis Tolliver
Copyright Date
1976
Language
en
Proquest ID
AAI7710344
File Format
application/pdf
File Size
210 pages
Recommended Citation
Tolliver, Charlie Louis, "Study of radio frequency excited argon plasma in a cathodic sputtering system " (1976). Retrospective Theses and Dissertations. 5807.
https://lib.dr.iastate.edu/rtd/5807